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| Application: | key raw material for photo acid generators |
| Chemical Name: | Methyl 2,2-difluoro-2-(fluorosulfonyl)acetate |
| CAS NO.: | 680-15-9 |
| Molecular Formula: | C3H3F3O4S |
| Molecular Weight: | 192.11 |
| Appearance: | Colorless to yellow,liquid |
| Purity: | ≥99% |
Chemical Structure:
