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| Category | Photo acid Generator |
| Chemical Name: | Mixed triarylsulfonium hexafluoroantimonate salt |
| CAS NO.: | 159120-95-3 |
| Molecular Formula: | C60H47F12S5Sb2+ |
| Molecular Weight: | 1399.84 |
| Appearance: | White powder |
| Purity: | ≥99% |
Chemical Structure:
