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Category: | Photo acid generator |
Chemical Name: | (4-(tert-butyl)phenyl)diphenylsulfonium 2-(4-(adamantan-1-yl)-1,1,2,2-tetrafluorobutoxy)-1,1,2,2-tetrafluoroethane-1-sulfonate |
CAS NO.: | 2220251-66-9 |
Molecular Formula: | / |
Molecular Weight: | / |
Application: | Photo acid generator for ArF or ArFi |
Purity: | 99%min |