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Tripenyl sulfonium bis(trifluoromethylsulfonyl)imide

CAS NO. 460731-17-3

Product Code: CA004

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Category：

Photo acid generator

Chemical Name:

Tripenyl sulfonium bis(trifluoromethylsulfonyl)imide

CAS NO.: 

460731-17-3

Molecular Formula:

C20H15F6NO4S3

Molecular Weight:

545.31

Application：

Photo acid generator for KrF

Purity:

99.5%min


Chemical structure:

结构式



Related Keywords: Photo acid generator,PAG
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